Loading [MathJax]/extensions/MathZoom.js
Mechanical variation of plasma potential, electron temperature and plasma density in a multi-dipole RF glow discharge | IEEE Conference Publication | IEEE Xplore

Mechanical variation of plasma potential, electron temperature and plasma density in a multi-dipole RF glow discharge


First Page of the Article

Date of Conference: 01 June 1992 - 03 June 1993
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-0716-X
Conference Location: Tampa, FL, USA

First Page of the Article