I. Introduction
As the channel length (L) of conventional metal-oxide semiconductor field - effect transistors (MOSFETs) is approaching ~10 nm, these devices face technological challenges due to very steep doping profile requirement at the pn junctions and high thermal budget. To resolve the issue, device architectures without junctions in source-channel-drain path have recently been explored. A junctionless transistor (JLT) has homogeneous and uniform doping throughout the source-channel-drain regions. JLTs have many advantages over conventional MOSFETs such as better SCE performance (reduced drain induced barrier lowering (DIBL) and subthreshold slope (SS) degradation) resulting better scalability, less sensitive to doping fluctuations and negative bias thermal instability, greatly simplified process flow and low thermal budgets after gate formation [1]–[4].