A Finite Element Simulation of the Propagation Properties Shear Surface Acoustic Wave Devices | IEEE Conference Publication | IEEE Xplore

A Finite Element Simulation of the Propagation Properties Shear Surface Acoustic Wave Devices


Abstract:

In this paper, the propagation properties of Love wave are analyzed from the wave equation of Love wave. According to the condition of generating Love wave, the model usi...Show More

Abstract:

In this paper, the propagation properties of Love wave are analyzed from the wave equation of Love wave. According to the condition of generating Love wave, the model using ST-90°X quartz wafer as substrate and SiO2 as overlay is simulated by ANSYS finite element software. The various velocities are calculated by the data of various modes, then the diagram of the velocity and frequency is drawn using the Lagrange interpolation function, which can prove the dispersion characteristics of Love wave. The Love wave device with 83MHz center frequency is designed according to the relationship between velocity and frequency, and its insertion loss is 10dB. The velocity of Love wave at 83MHz is calculated as 4922m/s according to the period of Interdigital transducer (IDT) and the amplitude-frequency characteristics measured by network analyzer, which is consistent with the simulation results.
Date of Conference: 28-29 October 2012
Date Added to IEEE Xplore: 10 January 2013
Print ISBN:978-1-4673-2646-9
Conference Location: Hangzhou, China

I. Introduction

Shear surface acoustic wave (SH-SAW) is a special surface acoustic wave in which each particle of the medium is pure shear motion. Because the directions of particles are parallel to the surface of the medium and perpendicular to the propagation direction of the wave, the propagation loss of SH-SAW is very small and the SH-SAW is sensitive to the environmental change. These characteristics can be used to develop various physical and chemical sensors with high precision [1]. In 2001, Michio, Kadota [2]~[3] reported on a new SH-SAW stimulated by Inter digital Transducer(IDT) which made of heavy metal and reflection gate using in ST- quartz substrate, and achieved a kind of mini resonator type filter based on this SH-SAW.

References

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