I. Introduction
Shear surface acoustic wave (SH-SAW) is a special surface acoustic wave in which each particle of the medium is pure shear motion. Because the directions of particles are parallel to the surface of the medium and perpendicular to the propagation direction of the wave, the propagation loss of SH-SAW is very small and the SH-SAW is sensitive to the environmental change. These characteristics can be used to develop various physical and chemical sensors with high precision [1]. In 2001, Michio, Kadota [2]~[3] reported on a new SH-SAW stimulated by Inter digital Transducer(IDT) which made of heavy metal and reflection gate using in ST- quartz substrate, and achieved a kind of mini resonator type filter based on this SH-SAW.