Surface Input/Output Optical Splitter Film for Multilayer Optical Circuits

A polymeric splitter film with input/output apertures on the surface is presented for multilayer optical circuits. We fabricated the surface input/output splitter via an ultraviolet imprint method using a mirror-integrated master. To fabricate the master, waveguide patterns were formed on a silicon wafer using a deep reactive ion etching method, and 45° angled mirrors as beam reflector were constructed at the waveguide core patterns via a V-sawing technique. We subsequently manufactured 1×2 and 1×4 surface input/output optical splitters and measured the optical characteristics of the splitters.

I. Introduction

Recently, various optical interconnections for large data transmission have been studied as alternatives to overcome limits of data transmission speed, electromagnetic interference, and power dissipation.