0 Nomenclature
Y
Young's modulus, .
EElectrical field, V/m.
Nominal film thickness, m.
Active electrical width of DE film, m.
Equivalent mechanical width of DE film, m.
Nominal length of DE film, m.
VVolume of DE film, .
cMechanical stiffness, N/m.
Lehr's damping ratio, 1.
xDisplacement, m.
Velocity, m/s.
Acceleration, .
Internal actuator force, N.
External actuator force, N.
Offset/amplitude-voltage, V.
iElectrical current, A.
gGain factor of amplifier, 1.
Nominal capacity of the actuator, F.
Thickness strain, 1.
Longitudinal strain, 1.
Maxwell stress, .
Relative permittivity, 1.
Vacuum permittivity, F/m.
Angular frequency, 1/s.
fFrequency, Hz.
Distortion factor, 1.
Actuator constant, .
Gain factor for voltage signal, 1.
Sensitivity of compensation, 1.