I. Introduction
With THE concerns of the safety issues of hydrogen energy, hydrogen sensors have been investigated in the decade [1]–[9]. Among the various types of hydrogen sensors, chemiresistor-based hydrogen sensors have been widely used due to the advantages of well-established fabrication and detection methods [3]–[5]. Fast response, low energy consumption, and low detection limit are the major critical factors to the hydrogen sensors. As the temperature decreases, the activation energy required for the gas–MOS reaction increases. This brings technical challenges in achieving both fast response and high sensitivity at room temperature. In this letter, we present a hydrogen nanosensor integrating gold (Au) interdigitated electrodes (IDEs) and indium oxide -doped tin dioxide nanoparticles and the influence of the Schottky barriers at the electrode/sensing-material interface on hydrogen sensing.