I. Introduction
Historically, cryogenic Si(Li) detectors were the primary sensors used in quantitative X-ray fluorescence. In recent years, Si-PIN diodes with Peltier cooling have come into common use [1], [2], delivering a resolution of 150 eV FWHM at 5.9 keV. These were initially used in portable applications but increasingly in laboratory settings. However, the sensitivity of Si-PIN detectors falls at energies above 15 keV. Recent environmental regulations, such as Europe's RoHS/WEEE Initiative [3], require non-destructive measurements of heavy metals such as Pb, Cd, and Hg. Applications such as mining or alloy analysis require measurement of metals such as Pt or Au. The L lines of these elements are below 20 keV but are closely spaced, leading to interferences. The K lines are more widely spaced, permitting much clearer identification of these metals and thus improved measurement precision [4], but Si detectors have very low sensitivity for these X-rays. Because CdTe and (CZT) have much higher stopping power, these detectors are a viable alternative. Both the total probability of interaction and the photofraction are far higher for CdTe than for Si for energies above 30 keV, dramatically improving the signal-to-background ratio for the K lines of higher Z elements.