1. Introduction
We are experiencing rapid development of semiconductor industry. In order to satisfy the requirement of electrical equipment, ceramic capacitors are developing toward smaller and more precise. Therefore, the quality control is more challenging than ever before. Traditionally, quality control process of ceramic capacitor wafer is performed by human experts and sample testing. However, humans are slower than the machines and get tired easily. Moreover, the size of components is diminishing to the scale that is hard to be inspected by human eyes. Therefore, in recent years, many automatic inspection equipments have been developed and many research works have been published [1], [2]. Almost all of them inspected the dimension and surface quality of finished product, little research has been done in middle process to control inferior products be taken into latter processes. Also in some manufactories, they introduce mechanical equipments into processes to filter unqualified semi-finished goods, but it is difficult to inspect some parameter, such as the silver electrode area of ceramic capacitor, the edge straightness, the circle concentricity and so on.