Abstract:
A novel MEMS spiral capacitor on glass substrate has been designed, simulated and fabricated. The square spiral capacitors with different width, space, thickness and turn...Show MoreMetadata
Abstract:
A novel MEMS spiral capacitor on glass substrate has been designed, simulated and fabricated. The square spiral capacitors with different width, space, thickness and turn number have been studied by HFSS. The fabrication process has been developed based on copper electroplating, and it is compatible with the copper inductor fabrication process, which can be integrated into LC filter. Finally, spiral capacitors with different dimensions and LC filters have been fabricated successfully
Date of Conference: 05-08 January 2009
Date Added to IEEE Xplore: 05 June 2009
ISBN Information:
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