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Study of a MOS imaging sensor with PIN structure

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Youshu-Huang; Weian-Zhu; Qingyi He; Guolin-Lu; Peng-Lin
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Abstract:

We designed and fabricated a new structure of PIN MOS imaging sensor. The result shows that its responsivity is high and its junction capacitance is small which is in goo...Show More

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Abstract:

We designed and fabricated a new structure of PIN MOS imaging sensor. The result shows that its responsivity is high and its junction capacitance is small which is in good agreement with the theoretical analysis.
Published in: Proceedings of 4th International Conference on Solid-State and IC Technology
Date of Conference: 24-28 October 1995
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-3062-5
DOI: 10.1109/ICSICT.1995.499772
Conference Location: Beijing, China

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