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Techniques and applications of laser micro-processing at the micron and sub-micron Level | IEEE Conference Publication | IEEE Xplore

Techniques and applications of laser micro-processing at the micron and sub-micron Level


Abstract:

Laser micro-processing techniques are becoming commonplace in the industrial production of high-tech devices. As the limit of conventional manufacturing is reached, laser...Show More

Abstract:

Laser micro-processing techniques are becoming commonplace in the industrial production of high-tech devices. As the limit of conventional manufacturing is reached, laser micro-processing presents itself as an enabling technology in a wide range of applications.
Date of Conference: 21-26 May 2006
Date Added to IEEE Xplore: 23 September 2008
CD:978-1-55752-813-1
Electronic ISSN: 2160-9004
Conference Location: Long Beach, CA, USA
References is not available for this document.

Introduction

Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision both in miniature devices and over large area substrates. The boundaries of various techniques for laser microprocessing are explored.

1.
K.L. Boehlen and I.B. Stassen Boehlen, "Laser micro-machining of high density optical structures on large substrates", SPIE, vol. 5339, pp. 118-126, 2004.

References

References is not available for this document.