Sun glasses for buildings based on micro mirror arrays: Technology, control by networked sensors and scaling potential

We present different applications of systems including networked sensors and micro- and nano-mirror arrays on large areas for light deflection and control. Mirror arrays are intended for implementation into windows of buildings to provide functionalities like daylight guiding into rooms, heat regulation and glare protection. Placed between the two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low-cost processes and materials, as well as a concept with a minimum of process steps and very easy and reliable process control. We present our technological approaches and first technological results. Further applications such as artificial light guiding and light concentration for photovoltaic applications are proposed.

1 INTRODUCTION

In nanoelectronics there is a general tendency towards continuously reduced structure dimensions, driven by the need of higher clock frequencies or enhanced storage densities. In addition, there is another trend towards micro-and nanostructures on large areas in display technologies, OLED-illumination and photovoltaics. These applications partly use conventional semiconductor materials but also thin-film technologies enabling low-cost fabrication on large areas. MEMS are implemented rarely on large areas: (i) display technology using MEMS based shutters [1], (ii) MEMS based optical filters [2] and (iii) micro mirror arrays for adaptive optics in astronomy [3] using semiconductor materials-not primarily low-cost. Especially MEMS based on thin film technology offer high potential to be produced at low-cost in contrast to semiconductor MEMS. We present large area implementation of electrostatically actuable micro mirrors for the deflection of light, e.g. in architectural applications to replace state of the art macroscopic solutions.