Atmospherich pressure plasma jets: Concepts and realization of miniaturized jets and jet arrays

Plasma jets presented here are based on cylindrical dielectric barrier discharges. Multi jet arrays formed from bundles of 6 and 10 individual single jets are realized in very compact housings. Surface treatments of polymers to increase their adhesion are discussed and compared to results achieved by other types of plasmas. A second type of ap plasma jet sources is based on an integrated ceramic technology. This technology can realize micro jets with diameters of a few hundred micrometers and a length of about 1 cm. All micro jets of an array can be manufactured in parallel with only a few fabrication steps. In the future also addressable micro jet arrays are conceivable which may be used for direct patterning of surfaces.

Cold atmospheric pressure (ap) plasmas in general and ap plasma jets in particular have gained considerable interest in research as well as in applications like polymer treatment or plasma cleaning. Plasma jets are almost the only means to realize a plasma treatment of three dimensional non flat work pieces at atmospheric pressure. Nowadays mostly relatively high power single jets based e. g. on blown arcs are used.