Contents RF MEMS capacitive devices, with their low loss and excellent linearity, are regarded as key devices for reconfigurable RF front-ends. To date however, the adoption of such devices in mobile handsets has been prevented by reliability issues. One of the major reliability issues is the dielectric charging inherent in electrostatic actuators [1]. Intelligent bipolar actuation (lBA), reported previously, has shown potential as a means to prevent the charging [2]. The instrument-based IBA approach, however, cannot be implemented in a circuit because of the time consuming charge detection process. We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module with an RF MEMS variable capacitor. No failures are observed over 108 cycles at 85°C, which is an accelerated charging condition.
Abstract:
We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module...Show MoreMetadata
Abstract:
We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module with an RF MEMS variable capacitor. No failures are observed over 108 cycles at 85degC, which is an accelerated charging condition.
Date of Conference: 03-07 February 2008
Date Added to IEEE Xplore: 04 March 2009
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1.
W. Merlijn van Spengen, R. Puers, R. Mertens et al., "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches," J. Micromech. Microeng., 14, pp. 514-521, 2004.
2.
H. Yamazaki, T. Ikehashi, T. Ohguro et al., "An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors," Sensors and Actuators A: Physical, Vol. 139, Issues 1-2, pp. 233-236, Sept. 12, 2007.
3.
Z. Peng, X. Yuan, J. C. M. Hwang et al., "Dielectric Charging of RF MEMS Capacitive Switches under Bipolar Control-Voltage Waveforms," IEEE Microwave Symp., pp. 1817-1820, 2007.
