Towards batch fabrication and assembly of 3D microstructures: A sequential assembly planner with new hard magnet configuration

We propose a new method for assembly of 3D microstructures. Hard magnets are arranged in a novel 120° offset configuration, allowing for in-situ magnetization. The new configuration makes the use of hard magnets feasible in batch fabrication, and hard magnets allow for the use of a uniform external field for application of magnetic torque. A sequential planner was developed to calculate layout and magnet orientations for given assemblies, based on this new magnet configuration. We describe the new magnet configu- ration, experimentally test the configuration, and present a planner that generates a planar layout and magnet orientations.

I. Introduction

3D microstructures have been used in devices such as microrobots [1], [3], [5], microsensors [6], and micro-optical devices [12]. As traditional micromachining is not well suited to fabricating complex 3D structures, self-assembly techniques assume significance. In this paper we introduce a self assembly method to build 3D microstructures from serially connected microfabricated panels.