A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control | IEEE Conference Publication | IEEE Xplore
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A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control

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T. Ikehashi; E. Ogawa; H. Yamazaki; T. Ohguro
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Abstract:

A 3 V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is control...Show More

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Abstract:

A 3 V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6 V pull- in voltage with the pull-out voltage as high as 2.0 V The measured capacitance ratio is 14.
Published in: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Date of Conference: 10-14 June 2007
Date Added to IEEE Xplore: 24 September 2007
ISBN Information:

ISSN Information:

DOI: 10.1109/SENSOR.2007.4300093
Conference Location: Lyon, France
References is not available for this document.
Contents

1. INTRODUCTION

RF MEMS variable capacitor is regarded as a key component in next generation reconfigurable RF front-end systems for mobile handsets, thanks to its low loss, excellent linearity and broad operation frequency [1], [2]. Piezoelectric actuators are ideal for such applications due to its low actuation voltage and low power consumption [3]–[5]. The ability to operate at 3V is especially attractive for mobile handsets, because power consuming charge pumps can be eliminated. It is also effective in reducing the bias voltage noise.

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H. C. Lee et al., "Silicon bulk micromachined RF MEMS switches with 3.5 volts operation by using piezoelectric actuator", IEEE MTT-S Dig., vol. 2, pp. 585-588, June 2004.
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J. H. Park et al., "Tunable Planar Inverted-F Antenna Using RF MEMS Switch for the Reduction of Human Hand Effect", Proc. Int. Conf. MEMS 2007, pp. 163-166, Jan 2007.
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T. Kawakubo et al., "Piezoelectric RF MEMS Tunable Capacitor with 3V Operation using CMOS Compatible Materials and Process", 2005 IEDM Dig., pp. 294-297, Dec. 2005.
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6.
T. Ikehashi et al., "A Robust RF MEMS Variable Capacitor with Piezoelectric and Electrostatic Actuation", IEEE MTT-S Dig., pp. 39-42, June 2006.
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Z. Feng et al., "MEMS-based series and shunt variable capacitors for microwave and millimeterwave frequencies", Sensors and Actuators, vol. 91, pp. 256-265, 2001.
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