The fabrication of an electrostatic linear actuator by silicon micromachining

A microactuator consisting of a plane wafer with striped electrodes covered with an insulation layer and thin cylindrical rollers was designed. When voltage is applied between the striped electrodes and the roller, the electric field between them attracts the roller, causing it to roll. As the roller passes over a striped electrode, the electrode is discharged and another in the forward direction is charged to keep the movement. The electrostatic linear actuator (ESLAC) consists of rollers inserted between a C-shaped stator and a slider that displaces linearly. Silicon micromachining techniques such as lithography, PCVD, and etching were utilized to fabricate the plane wafer. Model actuators were realized on silicon wafers. The performance of the models is examined.<>