Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Optical demultiplexers employing the turning-mirror-integrated arrayed-waveguide grating (AWG) are demonstrated on the silicon-on-insulator material. Description of the design and fabrication procedures is provided. The sizes of the devices are effectively reduced while the performance are comparable with that of the conventional AWG that was fabricated on the same wafer. The adjacent and nonadjacent crosstalks are better than -19 dB and -23 dB, respectively, and the typical on-chip channel loss less than 8.8 dB

I. Introduction

Optical multiplexers/demultiplexers (Muxs/Demuxs) are one of the most important components in dense wavelength division multiplexing (DWDM) systems. The optical Mux/Demux based on the arrayed waveguide grating (AWG) has been well investigated during the following decades [1], , , , , [6] due to its distinct advantages in applications of large-channel-number DWDM systems. Many material systems have been used to fabricate AWG-based optical Muxs/Demuxs. The SOI material bears peculiar significance in applications of integrated optics not only because it offers tremendous potential for the realization of optical waveguide components that are truly compatible with the progress in silicon IC technology, but also because it has provided a common platform for both the VLSI and PLC (Planar Lightwave Circuit) due to its excellent electrical and optical properties and the mature fabrication process. A number of SOI-based optical waveguide components have been demonstrated [4], [5], [7], , [9]. In [5], we proposed to use the turning mirror to replace arc-like waveguide bending in the AWG, forming a turning-mirror-integrated (TMI) waveguide array. In this paper, the detailed design consideration for this SOI-based TMI AWG is presented. It will be found that the TMI-AWG configuration provides a feasible way to realize compact AWG devices.