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Characterization of micromachined silicon rectangular waveguide at 400 GHz | IEEE Journals & Magazine | IEEE Xplore

Characterization of micromachined silicon rectangular waveguide at 400 GHz


Abstract:

We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 3...Show More

Abstract:

We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.
Published in: IEEE Microwave and Wireless Components Letters ( Volume: 16, Issue: 6, June 2006)
Page(s): 366 - 368
Date of Publication: 30 June 2006

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