Abstract:
An integrated process simulation system which uses functional utilities to integrate disparate 2-D simulation tools is described. The software utilities provide mechanism...Show MoreMetadata
Abstract:
An integrated process simulation system which uses functional utilities to integrate disparate 2-D simulation tools is described. The software utilities provide mechanisms for simulator input generation and user interaction, for mapping between different cross-section formats, and for output visualization. The specific utilities are described. With this approach, several process simulators for lithography, etching, deposition, and thermal processing have been integrated into a unified system, SIMPL-IPX (simulation of profiles from the layout-integrated process simulation environment with X-Windows). Simulation examples for metal l planarization, bipolar technology with a polysilicon , collector 5 plug, and advanced lithography are presented to demonstrated 7 the usefulness of this approach to technology CAD tool 8 integration. Methods for improved data management using 9 a CAD framework are described.<>
Published in: IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems ( Volume: 11, Issue: 7, July 1992)
DOI: 10.1109/43.144855
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Simulation Process ,
- Etching ,
- Thermal Process ,
- Deposition Process ,
- Process Flow ,
- Simulation Tool ,
- Wide Range Of Problems ,
- Physical Simulation ,
- Input Generation ,
- polySia ,
- Data Structure ,
- Aerial Images ,
- Photolithography ,
- Courtship Behavior ,
- Core Samples ,
- Metal Deposition ,
- Element Mesh ,
- External Tools ,
- Etching Rate ,
- Wafer Surface ,
- Cross-sectional Information ,
- Surface Etching ,
- Internal Data Structure ,
- Multiple Processing Steps
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Simulation Process ,
- Etching ,
- Thermal Process ,
- Deposition Process ,
- Process Flow ,
- Simulation Tool ,
- Wide Range Of Problems ,
- Physical Simulation ,
- Input Generation ,
- polySia ,
- Data Structure ,
- Aerial Images ,
- Photolithography ,
- Courtship Behavior ,
- Core Samples ,
- Metal Deposition ,
- Element Mesh ,
- External Tools ,
- Etching Rate ,
- Wafer Surface ,
- Cross-sectional Information ,
- Surface Etching ,
- Internal Data Structure ,
- Multiple Processing Steps
