1 Introduction
Piezoelectric ceramic motors (PCMs) are primarily piezoelectric ceramic actuators, which are operating at ultrasonic frequency. They have been widely applied to many practical industrial applications due to their merits of smaller dimension, large static holding-force, high driving force at low speed, silence, excellent controllability, compactness in size, no electromagnetic interference and more minimum step size than the classic electromagnetic-type motors, etc. The driving principles of linear piezoelectric ceramic motors (LPCMs) are based on the ultrasonic vibration force of piezoelectric ceramic elements and mechanical frictional force [1]. Therefore, their mathematical models are complex [2] and the motor parameters are time varying due to increasing in temperature and changing in motor drive operating condition [1]. The control accuracy is much influenced by the existence of uncertainties, which usually comprises parameter variations, external disturbances and high-order dynamics, etc.