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Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor | IEEE Conference Publication | IEEE Xplore

Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor


Abstract:

This paper presents a facile fabrication approach for micro-electro-mechanical systems (MEMS) thermal sensors, utilizing laser ablation and origami techniques to create a...Show More

Abstract:

This paper presents a facile fabrication approach for micro-electro-mechanical systems (MEMS) thermal sensors, utilizing laser ablation and origami techniques to create a 3D free-standing structure. A single-step fabrication for a micromachined metal structure was demonstrated using a fiber laser. Thin nichrome sensing structures as small as 45.1 ¼m width were fabricated, with an electrical resistance of up to 6 Ω and a TCR of 390.39 ppm/°C. Thermal analysis via infrared thermography revealed that the free-standing structure exhibits a diminished thermal mass. The voltage response for airflow demonstrates the sensing ability of the fabricated structure, showcasing its potential for airflow sensing applications.
Published in: 2024 IEEE SENSORS
Date of Conference: 20-23 October 2024
Date Added to IEEE Xplore: 17 December 2024
ISBN Information:

ISSN Information:

Conference Location: Kobe, Japan

I. Introduction

Micro-electro-mechanical systems (MEMS) have revolutionized various fields, including biomedical applications, due to their miniature size and high functionality [1]. MEMS sensors are broadly classified into mechanical, optical, magnetic, and thermal sensors, each utilizing unique sensing structures such as cantilevers, photodiodes, hall effects, and resistive temperature detectors (RTDs) to perform specific functions [2]. In the realm of biomedical applications, MEMS sensors play a crucial role in monitoring physiological parameters, aiding in diagnostics, and facilitating therapeutic interventions [3]– [5].

References

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