I. Introduction
Micro-electro-mechanical systems (MEMS) have revolutionized various fields, including biomedical applications, due to their miniature size and high functionality [1]. MEMS sensors are broadly classified into mechanical, optical, magnetic, and thermal sensors, each utilizing unique sensing structures such as cantilevers, photodiodes, hall effects, and resistive temperature detectors (RTDs) to perform specific functions [2]. In the realm of biomedical applications, MEMS sensors play a crucial role in monitoring physiological parameters, aiding in diagnostics, and facilitating therapeutic interventions [3]– [5].