I. Introduction
Surface Acoustic Wave (SAW) devices are crucial in various applications due to their unique ability to generate and manipulate acoustic waves on piezoelectric substrates. These devices leverage semiconductor planar processes to create fork-finger-like metal electrodes, known as interdigitated electrodes (IDT), on the substrate surface. When an alternating voltage is applied to these electrodes, they generate surface acoustic waves (SAW) on the substrate's surface [1]–[3].