I. Introduction
Today’s terahertz (THz) spectroscopy systems are still primarily a scientific tool rather than being widely adopted for high-volume industrial use. Here, common available spectrometers lack scalability in footprint and often have too low measurement rates for industrial applications. With continuous wave (cw) THz generation based on optoelectronic photomixing, we overcome these limitations by employing photonic integrated solutions that allow for small footprints and scalable costs. In contrast to time-domain spectroscopy (TDS) systems, which rely on fs-optical pulses and often require variable optical delay lines, all parts of a cw THz system can be implemented as photonic integrated components. Furthermore, with fast tunable semiconductor lasers and optical phase modulation, there is also potential to increase the measurement rate beyond the current state-of-the-art of commercial terahertz spectrometers.