High-Efficiency Energy Collection Module of Vacuum Ultraviolet Monochromator Based on Image Slicers

In the measurement of the photoemission yield spectrum and energy spectrum, the energy intensity of UV monochromatic light plays a crucial role in determining the signal-to-noise ratio of the test results. The efficiency of the monochromator is a key factor in limiting the energy of UV monochromatic light. Therefore, designing an efficient vacuum ultraviolet monochromator is highly important. This paper analyzes the factors that affect the efficiency of UV monochromatic light and proposes a design for an energy collection module based on image slicers. By using the principle of integral field, the light spot at the entrance slit of the monochromator changes from circular to strip. This module covers a wavelength range of 115nm-400nm and achieves high efficiency. The energy utilization efficiency in the 115nm-145nm range is increased by 2.4 times, while in the 145nm-400nm range, it is increased by 5.1 times.

I. Introduction

With the development of space technology and semiconductor technology, the analysis of material surface characteristics is of tremendous significance [1]–[2]. An ultraviolet electron spectrum analyzer is an instrument to solve this problem. The vacuum ultraviolet monochromator, which serves as the core component of this analyzer, provides a high-resolution ultraviolet monochromatic light source that can be adjusted continuously for testing purposes. However, the efficiency of the existing vacuum ultraviolet monochromator is often quite low, which dramatically limits the test efficiency and signal-to-noise ratio.