A Switched Capacitor Based Capacitance Measurement Method for Integrated Circuits

This paper presents a integrated circuits capacitance measurement method based on switched capacitor circuits. Compared with other capacitance measurement methods, simple circuit design and wide measurement range are the mainly advantages. The whole circuit is designed using 45nm CMOS standard componments, which allows it to be BIST method for contemporary integrated circuits. The HSPICE simulation and practical experiment show that the proposed method can measure the capacitance ranged from $10 fF$ to $80pF$ with measurement deviation less than 1.5%.

I. Introduction

With the development of integrated circuits (ICs) technology, small capacitors are used more frequently and the effect of parasitic capacitance becomes hard to neglect. To guarantee the effectiveness and reliability of ICs, it is necessary to implement capacitance measurement during ICs manufacturing process.