I. Introduction
Phased array system is one of the crucial framework of the next-generation mobile communication system and the modern radar detection system [1], [2]. In order to meet the increasingly strict requirements of phase array including wideband, high scanning resolution, and low beam squinting, high performance phase shifters (PSs) are in great demand [3], [4]. It is a great challenge for traditional PSs to fully achieve wide operating band, low loss and phase error.