I. Introduction
By virtue of their rapid response and nanometer resolution, piezoelectric–driven motion (PDM) systems have emerged as popular devices in the fields of high–precision positioning [1], [2]. However, the hysteresis nonlinearity induced by piezoelectric actuation is a dominant effect that degrades the positioning accuracy. Different control strategies with or without considering the hysteresis model have been developed (see [3], [4], and the references therein). To improve the tracking accuracy of the PDM systems, adaptive pseudo inverse control [5], iterative learning control [6], and sliding mode control [7] have been investigated and attained certain control effects. The backstepping control method, which is an effective recursive design technique, is applicable in dealing with the control problems of nonlinear systems [8], [9]. Considering that hysteresis models are always subject to modeling errors, this brief investigates a robust adaptive backstepping control design without the use of hysteresis model.