Author details
Author's Published Works
Scheduled Maintenance on Monday 1/13/2025
Single article sales and account management will be unavailable from 5:00 AM - 7:00 PM ET (09:00 - 23:00 UTC). We apologize for the inconvenience.
Author details
Showing 1-25 of 41 results
- Sort
Filter Results
Show
Sort By
Results
Rapid Thermogravimetric Analysis based on MEMS Resonant Cantilever
Zhi Cao;Hao Jia;Xiaoyang Zhang;Shanlai Wang;Haitao Yu;Pengcheng Xu;Xinxin Li;Dan Zheng
2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Year: 2023 | Conference Paper |
We report on the experimental demonstration of rapid thermogravimetric analysis (TGA) with minimized thermal lag using MEMS resonant cantilevers. Thanks to the miniature device size and unique thermal isolation structure design, the sample loading area at the cantilever free end can be heated up to 800°C and simulated to be stabilized within milliseconds, suggesting a theoretical ultrahigh ramp ra...Show More
Instrumental Analysis of Advanced Catalysts Based on Resonant Microcantilevers
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2023 | Conference Paper |
Cited by: Papers (1)
Advanced catalysts are highly influential in various research and application fields. The catalytic performance parameters, such as catalytic activity and kinetics, were mainly characterized using the commercial-available TPD instruments (i.e., temperature-programmed desorption), which ex-situ measure the probe molecules in the gas flow. In this paper, a special-designed resonant microcantilever h...Show More
Porous Titania Nanosheets as Micro-Gravimetric Sensing Material for Trace NO2 Detection
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Year: 2021 | Conference Paper |
The detection to trace-level NO2 gas at room-temperature is of great importance to both environmental protection and public health. Herein, two-dimensional porous TiO2 nanosheets (PTNS) as highly active sensing material are synthesized by a facile high-temperature calcination approach for the detection of NO2 gas at room-temperature. The PTNS show anatase crystal structure and porous morphology wi...Show More
Resonant Microcantilever Based Micro Thermal Gravimetric Analyzer (μ-TGA)
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2021 | Conference Paper |
Cited by: Papers (2)
For the first time, a new type of resonant microcantilever integrated with a specially designed micro-heater at its free-end is employed to develop the next-generation micro thermal-gravimetric analyzer (named μ-TGA). Our integrated resonant microcantilever combines multi-functions in one chip including mass-weighing, heating and temperature measuring and therefore, shows significant advantages fo...Show More
Devices used to set and control the environmental temperature are critical to the performance of gas-sensitive material analyzers, which use silicon microcantilevers to characterize the gas-sensitive materials. This paper describes a novel microtemperature-control device that uses a double Peltier structure to replace the traditional refrigerant temperature control system. A proportional-integral-...Show More
In-Plane Mode Resonant Cantilever Sensor to Detect Kinetic/Thermodynamic Parameters for Aptamer-Ligand Binding
Xuefeng Wang;Yarong Cheng;Shengran Cai;Pengcheng Xu;Ying Chen;Haitao Yu;Xinxin Li
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2020 | Conference Paper |
An in-plane mode resonant cantilever sensor working in solution is developed for detecting physicochemical parameters of aptamer-ligand binding. The cantilever body is enclosed inside a hydrophobic parylene shell, and a ring-shaped hydrophobic slit is designed to prevent the solution leak inside the shell, allowing the cantilever structure keeps high-Q resonance in air while the binding sensing po...Show More
Optimization of Nano-Copper as H2S Gas Sensing Material by Quantitatively Evaluating Thermodynamic Enthalpy with Resonant Microcantilever
Ming Li;Pengcheng Xu;Haitao Yu;Xueqing Wang;Ying Chen;Xinxin Li
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2020 | Conference Paper |
This paper proposes a method for optimizing Cu nanocrystals (denoted as nano-Cu) as sensing materials for specific H2S detection by the quantitatively extracted enthalpy ($\Delta H^{\circ}$) with resonant microcantilevers. The activities of two nano-Cu with different exposed crystal planes are discriminated and their suitable applications are reasonably suggested. The much higher H2S adsorption ac...Show More
Regioselective Construction of Metal-Organic Framework (MoF) Sensing Film on Parylene-Patterned Resonant Microcantilever for Highly Toxic Molecules Detection
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2019 | Conference Paper |
In this work, Parylene-C is patterned and formed a sample reservoir on the free-end of resonant microcantilever for nano sensing material construction. The Parylene formed reservoir is suitable for corrosive precursor loading and sensing material in-situ construction. On the other hand, the Parylene film effectively protects the integrated elements including signal readout element and exciting hea...Show More
A MEMS Reactor for Observing Morphology-Evolution in Tem and Simultaneously Detecting Involved Molecule-Number Change During Nano-Constructing Reaction
Wei Li;Haitao Yu;Fanglan Yao;Xueqing Wang;Pengcheng Xu;Ming Li;Xinxin Li
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2019 | Conference Paper |
This study develops a novel MEMS reactor for in situ structure-property correlative characterization during nano-construction process. With the nano-reactant putting inside, the micro-reactor is installed in a transmission-electron-microscope (TEM). Nano-constructing reaction occurs after the reacting-gas of variable concentration and pressure is introduced into the reactor to react with the nano-...Show More
Optimized Detection to Organophosphorous Pesticide by Selecting the Most Appropriate Nano-Size of Sensing Nano-Material
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2019 | Conference Paper |
This paper reports an optimal sensing nanomaterial of mesoporous-silica SBA-15 for detecting residual organophosphorous (OP) pesticide by selecting appropriate wall-thickness of the amorphous-SiO2 nano-channels to optimize the interaction activity of the surface ≡Si-OH with P=O in OP molecules. With the different-sized SBA-15 nanomaterials loaded at the free ends of resonant-cantilevers, optimizat...Show More
Integrated Resonant Dual-Microcantilevers Combined Sensor with Accurate Identification and Highly-Sensitive Detection to H2S Gas
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Year: 2019 | Conference Paper |
Cited by: Papers (4)
This paper shows a novel integrated resonant dual-microcantilevers combined gas sensor which can identify and detect trace-level H2S. With two kinds of specially designed sensing materials loaded respectively, one cantilever can identify H2S by outputting positive frequency shift signals, while the other cantilever will detect H2S as a normally used cantilever sensor with negative frequency shifts...Show More
This work reports a new method for real-time observing the growth process of metal-organic framework (MOF) nanocrystals under in-situ TEM (transmission electron microscopy). For MOF grown via gas-solid reaction, the ligands should be firstly vaporized and then introduced to the surface of metal-contained building-blocks for further gas-solid reaction. One challenge for in-situ TEM observing MOF gr...Show More
This paper reports a new technique with in-situ transmission electron microscopy (in-situ TEM) and resonant microcantilever to comprehensively evaluate sulfurization performance of ZnO nanowires. Herein, in-situ TEM is used to real-time observe the sulfurization process of ZnO nanowires under SO2-contained atmosphere. Based on temperature-varying micro-gravimetric method, thermodynamic interaction...Show More
Resonant-gravimetric particle sensors with air-filtering cantilever fabricated in low-cost non-SOI silicon
Yuyang Bao;Shengran Cai;Haitao Yu;Tiegang Xu;Pengcheng Xu;Xinxin Li
2018 IEEE Micro Electro Mechanical Systems (MEMS)
Year: 2018 | Conference Paper |
Cited by: Patents (2)
This paper reports a novel resonant-gravimetric micro-cantilever for detecting air particles (e.g. PM2.5), which is single-sided fabricated in low-cost non-SOI wafers. To filter the particle with desired size, a row of barrier bars is integrated in an air-flow micro-channel which is embedded in the cantilever. After air flow with particles is pumped into the channel, the particles with concerned d...Show More
Ni2(dobdc) MOF (metal-organic framework) nanocrystals for ultra-sensitive detection of ppb-level co with resonant-cantilever
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2017 | Conference Paper |
MOF (metal-organic framework) material of Ni2(dobdc) (where dobdc = 1,4-dioxido-2,5-benzenedicarboxylate) nanocrystals is, for the first time, explored as resonant-gravimetric sensing material for CO detection. Due to the ultra-high surface-area and the active metal center-sites, the MOF of Ni2(dobdc) exhibits adsorbing induced high-performance sensing to CO gas. By loading the MOF material onto r...Show More
Ni2(dobdc) MOF (metal-organic framework) nanocrystals for ultra-sensitive detection of ppb-level co with resonant-cantilever
Year: 2017 | Conference Paper |
MOF nano-crystals of ZIF-8 identified as ambient NO2 gas absorbent by using resonant micro-cantilever experiment
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2017 | Conference Paper |
Based on resonant micro-cantilever measurements, the metal-organic framework (MOF) nano-crystal material of ZIF-8 is, for the first time, identified as an excellent absorbent to capture/fix the automobile exhaust of NO2 in real atmospheric air. By using MEMS resonant cantilever as material evaluation tool, the adsorbing properties of ZIF-8 to NO2 gas have been experimentally examined not only for ...Show More
MOF (metal-organic framework) nanomaterial for 400ppb-concentration detectable xylene gas sensors
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2017 | Conference Paper |
Cited by: Papers (3)
In this paper, metal-organic framework (MOF) is explored as xylene sensing-material for resonant-cantilever gas sensor. Sensing experiment with the MOF nano-material of HKUST-1 demonstrates that 400 ppb xylene can be detected. This limit of detection (LOD) has been lower than the human olfactory threshold. The sensing mechanism is identified as the interaction between MOF and xylene. The specifici...Show More
Graphene-oxide (GO) nano-sheets: Lateral and vertical size-effects on chemical-gas sensitivity enhancement
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2016 | Conference Paper |
Cited by: Papers (3)
The paper reports a size-effect of graphene-oxide (GO) nano-sheets on sensitivity of chemical-gas detection. By using resonant-cantilevers to measure molecule-adsorbing induced mass, the size-effect is classified as in-plane dimension lateral-effect and vertical thickness-effect. Based on detection of both reducing-gas of NH3 and oxidizing-gas of NO2, this research clearly reveals that, lateral-di...Show More
Resonant-cantilever as micro-instrument to extract activation-energy (Ea) of molecule adsorption for kinetics modeling of gas sensing materials
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2015 | Conference Paper |
Cited by: Papers (2)
In this work, resonant microcantilever sensor is firstly used for real-time record of gas uptake on sensing material to extract the key kinetic parameter of activation energy (Ea), which characterizes molecule adsorbing rate. With the extracted parameter of Ea, the important gas sensing performance of response speed can be quantitatively evaluated with theory of molecule sorption kinetics and opti...Show More
Gas sensing material: Synergistic optimization among sensitivity, repeatability and response speed by quantitatively extracted kinetic & thermodynamic model parameters
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2015 | Conference Paper |
Cited by: Papers (1)
Based on resonant-cantilever adsorbing experiment, a set of key thermodynamic/kinetic parameters of gas sensing materials is quantitatively extracted for overall performance assessment among sensitivity, repeatability and speed. With the method, individual optimization for carrier-structure and sensing-group of organophosphate sensing material is achieved for sensing-performance synergistic improv...Show More
A gas-liquid separated in-plane swing-mode resonator with high Q-factor in solution for real-time bio-sensing
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2015 | Conference Paper |
High Q-factor is achieved in liquid by using an in-plane swing-mode micro-resonator that is specific-designed with a gas-liquid separated structure. Such a resonator can be used for long-term operation in solution for real-time bio-detection. With design of an anti-leakage narrow ‘hydrophobic-slit’ to protect the resonator still in air for high-Q vibration, while only the sensing-region of the dev...Show More
A gas-liquid separated in-plane swing-mode resonator with high Q-factor in solution for real-time bio-sensing
Year: 2015 | Conference Paper |
Quantitatively extracted Gibbs free-energy (ΔG) as criterion to determine working temperature range of gas sensing-material
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2015 | Conference Paper |
Cited by: Papers (1)
Micro-gravimetric resonant microcantilever is firstly used as a tool to determine the working temperature-range of molecule-adsorbing type sensing material. According to the criterion of ΔG(T)=ΔH-TΔS≥0, the maximum working-temperature (Tmax) for molecule-adsorbing function of the material can be obtained. This method is successfully used to determine the Tmax for two organophosphorus sensitive mat...Show More
Quantitatively extracted Gibbs free-energy (ΔG) as criterion to determine working temperature range of gas sensing-material
Year: 2015 | Conference Paper |
Water-proof ‘μ-diving suit’ dressed on resonant biochemical sensor for online detection in solution
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2015 | Conference Paper |
This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep...Show More
A resonant micro-cantilever frequency tracking system based on dynamic phase difference
2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings
Year: 2014 | Conference Paper |
Cited by: Papers (1)
Gravimetric system based on resonant micro-cantilever had drawn significant attention in trace material detection. Adsorption quantity could be measured by the change of cantilever's resonant frequency, and phase-locked loop (PLL) was commonly used to keep the cantilever resonating. However, in the application of traditional PLL, we have to adjust parameters of the phase shifter to make sure the l...Show More
Mesoporous-silica nano-channels integrated in micro-fluidic chip for fast liquid micro-extraction of pesticide residual
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2014 | Conference Paper |
The paper reports a micro-chip with nano-pore channels integrated in a micro-channel as reservoir for quickly extracting analyt from aqueous solution to water-soluble organic solvents. Using this novel technology, trace-level residual of organophosphorus pesticide in water-solution can be micro-extracted to a common organic-solvent (e.g., ethanol) for subsequent analysis by GC-MS (Gas Chromatograp...Show More
IEEE Account
Purchase Details
Profile Information
Need Help?
- US & Canada: +1 800 678 4333
- Worldwide: +1 732 981 0060
- Contact & Support
- About IEEE Xplore
- Contact Us
- Help
- Accessibility
- Terms of Use
- Nondiscrimination Policy
- Sitemap
- Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest technical professional organization dedicated to advancing technology for the benefit of humanity.
© Copyright 2025 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.