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Arantxa Uranga - IEEE Xplore Author Profile

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Author details

Arantxa Uranga

Also published under: A. Uranga

Publications

77

Citations

745

Publications by Year

20042024

Co-Authors:

G. AbadalJ. ArcamoneN. BamiolNÚria BarniolA. Boisen

Show All Co-Authors (68)

Arantxa Uranga

Also published under: A. Uranga

Affiliation

Department of Electronics Engineering

Universitat Autònoma de Barcelona

Barcelona, Spain

Publication Topics

Resonance Frequency,
Top Electrode,
Low-noise Amplifier,
Sound Pressure,
Speed Of Sound,
Ultrasound Imaging,
Acoustic Features,
Acoustic Impedance,
Beamwidth,
Central Rows,
Fast Fourier Transform,
Frequency Response

Biography

Arantxa Uranga was born in Burgos, Spain, in 1971. She received the degree in physics and electronic engineering from the Valladolid University, Spain, in 1994 and 1996, respectively, and the Ph.D. degree in electronic engineering from the Autònoma University of Barcelona, Spain, in 2001.,Since 1996, she has been with the Department of Electronic Engineering, Universitat Autònoma de Barcelona, where she is a Research Scientist. Her research interests include the design of CMOS circuits for biomedical and RF applications.(Based on document published on 6 June 2005).

Publications

77

Citations

745

Publications by Year

20042024

Co-Authors:

G. Abadal
J. Arcamone
N. Bamiol
NÚria Barniol
A. Boisen

Show All Co-Authors (68)

Author's Published Works

Search History

Showing 1-25 of 77 results

Conferences (59)

Journals (18)

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Single Year
A. Uranga(41)
N. Barniol(40)
Arantxa Uranga(35)
F. Torres(22)
Núria Barniol(19)
Department of Electronic Engineering, Universitat Autònoma Barcelona, Bellaterra, Spain(4)
Universitat Autonoma de Barcelona, Barcelona, Catalunya, ES(4)
Silterra Malaysia Sdn. Bhd., MALAYSIA(3)
Departament d’Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, Spain(3)
SilTerra Malaysia Sdn Bhd, Malaysia(3)
IEEE Electron Device Letters(6)
IEEE Sensors Journal(5)
2010 IEEE International Frequency Control Symposium(3)
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)(3)
2005 IEEE International Symposium on Circuits and Systems(2)
IEEE(77)
New Orleans, LA, USA(4)
Kaohsiung, Taiwan(3)
Lyon, France(3)
Newport Beach, CA, USA(3)
Berlin, Germany(2)
Resonance Frequency(60)
Quality Factor(24)
CMOS Technology(18)
Phase Noise(16)
Parasitic Capacitance(13)

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Results

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Eyglis Ledesma;Arantxa Uranga;Núria Barniol

IEEE Sensors Journal

Year: 2024 | Volume: 24, Issue: 13 | Journal Article |

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This work presents a minute single-chip piezoelectric micromachined ultrasonic transducers (PMUTs)-on-complementary metal-oxide-semiconductor (CMOS)-based hydrophone with high receiving sensitivities and low noise. The system is based on three different Sc9.5%Al90.5%N PMUTs geometries: (a) square with an

$80 \, \mu$ m side, (b) rectangular with a dimension of

$60 \times 40 \, \mu$ m, and (c) a...Show More

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Eyglis Ledesma;Arantxa Uranga;Núria Barniol

IEEE Sensors Journal

Year: 2024 | Volume: 24, Issue: 13 | Journal Article |

Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images

Eyglis Ledesma;Arantxa Uranga;Francesc Torres;Núria Barniol

IEEE Sensors Journal

Year: 2024 | Volume: 24, Issue: 10 | Journal Article |

Cited by: Papers (4)

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This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound imaging systems and capabilities to obtain resolutions under $100 \mu \text{m}$ . The system-on-chip (SoC) consists of ${7} \times {7}$ AlScN PMUTs connected in a 1-D configuration where the six external rows are used to...Show More

Fully Integrated Pitch-Matched AlScN PMUT-on-CMOS Array for High- Resolution Ultrasound Images

Eyglis Ledesma;Arantxa Uranga;Francesc Torres;Núria Barniol

IEEE Sensors Journal

Year: 2024 | Volume: 24, Issue: 10 | Journal Article |

AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) as Proximity Sensors

Eyglis Ledesma;Francesc Torres;Arantxa Uranga;Núria Barniol

2023 14th Spanish Conference on Electron Devices (CDE)

Year: 2023 | Conference Paper |

Cited by: Papers (1)

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This paper presents an AlN piezoelectric micromachined ultrasonic transducer (PMUT) to be used in proximity sensor applications. The device consists of an annular membrane fabricated with the piezoMUMPs process with a resonance frequency in the air of 275 kHz. As a proof of concept, two identical PMUTs were used in a pitch-and-catch ultrasound experiment to demonstrate their capabilities as proxim...Show More

AlN Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) as Proximity Sensors

Eyglis Ledesma;Francesc Torres;Arantxa Uranga;Núria Barniol

2023 14th Spanish Conference on Electron Devices (CDE)

Year: 2023 | Conference Paper |

A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array

Eyglis Ledesma;Iván Zamora;Francesc Torres;Arantxa Uranga;Núria Barniol

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2023 | Conference Paper |

Cited by: Papers (1)

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This paper presents a 0.35 mm2 multi-element annular piezoelectric micromachined ultrasonic transducer array monolithically integrated on CMOS (PMUT-on-CMOS) capable of monitoring fluid level changes and evaporation rates in very small quantities and with high sensitivity in a non-invasive and non-intrusive way. Each individual PMUT consists of a 40 μm square AlScN PMUT with a resonance frequency ...Show More

A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array

Eyglis Ledesma;Iván Zamora;Francesc Torres;Arantxa Uranga;Núria Barniol

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2023 | Conference Paper |

An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and Compressibility

Eyglis Ledesma;Iván Zamora;Jesús Yanez;Arantxa Uranga;Núria Barniol

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2023 | Conference Paper |

Cited by: Papers (5)

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This paper presents a monolithic system-on-chip based on a single piezoelectric micromachined ultrasonic transducer (PMUT) and its CMOS analog front-end circuitry. This fabricated PMUT-on-CMOS system provides a novel solution for monitoring fluid hydrodynamic properties through very low amounts of liquid exploiting its characteristics as resonator and the acoustic wave propagation in the media. Th...Show More

An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and Compressibility

Eyglis Ledesma;Iván Zamora;Jesús Yanez;Arantxa Uranga;Núria Barniol

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2023 | Conference Paper |

Combined use of Fresnel lens and holey-structrured metamaterial to obtain beam focus far from ultrasound source

F. Torres;N. Barniol;A. Uranga

2022 IEEE International Ultrasonics Symposium (IUS)

Year: 2022 | Conference Paper |

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This paper studies the feasibility to microfabricate the protective layer needed over the ultrasound sources combining Fresnel lens and holey-structured metamaterial for focusing and enhance resolution while providing protection to the ultrasound system.Show More

Combined use of Fresnel lens and holey-structrured metamaterial to obtain beam focus far from ultrasound source

F. Torres;N. Barniol;A. Uranga

2022 IEEE International Ultrasonics Symposium (IUS)

Year: 2022 | Conference Paper |

A 0.5 mm2 pitch-matched AlN PMUT-on-CMOS ultrasound imaging system

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2022 IEEE International Ultrasonics Symposium (IUS)

Year: 2022 | Conference Paper |

Cited by: Papers (2)

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This paper presents a 0.5 mm2pitch-matched array based on 7x7 AlN piezoelectric micromachined ultrasonic transducers (PMUTs) monolithically integrated with its 130 nm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The transmission side is composed of three high voltage CMOS Pulsers while the readout is only carried out at the central row by a CMOS Low Noise Amplifier. T...Show More

A 0.5 mm2 pitch-matched AlN PMUT-on-CMOS ultrasound imaging system

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2022 IEEE International Ultrasonics Symposium (IUS)

Year: 2022 | Conference Paper |

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

IEEE Electron Device Letters

Year: 2022 | Volume: 43, Issue: 7 | Journal Article |

Cited by: Papers (12)

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In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT’s) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The ${7}\times {7}$ array along with the analog-front-end circuit has been configured to work as a linear phased array. Experiments carried out have demonstrated the homogeneous PMUT’s behavior, showing a sma...Show More

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

IEEE Electron Device Letters

Year: 2022 | Volume: 43, Issue: 7 | Journal Article |

AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range

Jesus Yanez;Eyglis Ledesma;Arantxa Uranga;Nuria Barniol

2021 IEEE International Ultrasonics Symposium (IUS)

Year: 2021 | Conference Paper |

Cited by: Papers (4)

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Current bulk acoustic microresonators offer improved resolution respect to Quartz Crystal Microbalance and Surface Acoustic Wave devices, but tend to be brittle during operation as sensors or requires multiple precisely controlled deposition steps. Here we present an acoustic microsensor to identify presence of liquid in microchannels, which is mechanically robust and simpler to manufacture. Its e...Show More

AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range

Jesus Yanez;Eyglis Ledesma;Arantxa Uranga;Nuria Barniol

2021 IEEE International Ultrasonics Symposium (IUS)

Year: 2021 | Conference Paper |

Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

Jesus Yanez;Arantxa Uranga;Nuria Barniol

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Year: 2021 | Conference Paper |

Cited by: Papers (3)

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Here we present a longitudinal bulk-acoustic-wave microsensor using the pulse-echo mode of operation to identify presence of liquid in microchannels by its compressional properties, with the particularity of sub-I-volt and multi-frequency operation in the 1 - 10 GHz range. The effect produced by the configuration of layers and materials constituting these bulk acoustic transducers was studied anal...Show More

Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

Jesus Yanez;Arantxa Uranga;Nuria Barniol

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Year: 2021 | Conference Paper |

Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2021 | Conference Paper |

Cited by: Papers (16)

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This paper presents a fully operational integrated ultrasound transceiver based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The single PMUT-on-CMOS transducer produces ultrasound waves in liquid environment with competitive values, as actuator: 71 Pa*mm*V-1 a...Show More

Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2021 | Conference Paper |

9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2021 | Conference Paper |

Cited by: Papers (20)

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This paper presents an 80 μm squared piezoelectric micromachined ultrasonic transducer (PMUT) using 9.5 % scandium-doped aluminum nitride (AlScN). The improvement in the effective piezoelectric coefficient (e31,f) and consequently in the membrane displacement was demonstrating according with the FEM simulation. The proposed device has a high piezoelectric coefficient factor (kt2) in air, 2.76 %, a...Show More

9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Year: 2021 | Conference Paper |

Improved Electromechanical Transduction for PiezoMUMPS HBAR Impedance Sensors

Jesus Yanez;Eyglis Ledesma;Arantxa Uranga;Nuria Barniol

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

Year: 2020 | Conference Paper |

Cited by: Papers (3)

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This study discloses how the distribution of the effective electromechanical coupling in the modes of our HBAR ultrasonic sensors at GHz range is significantly affected by the configuration of layers and materials used for its manufacture. Using analytical models from the literature supported by FEM simulations, frequency bands with greater coupling were found due to the effect of extra materials ...Show More

Improved Electromechanical Transduction for PiezoMUMPS HBAR Impedance Sensors

Jesus Yanez;Eyglis Ledesma;Arantxa Uranga;Nuria Barniol

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)

Year: 2020 | Conference Paper |

Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications

Iván Zamora;Eyglis Ledesma;Arantxa Uranga;Núria Barniol

Year: 2020 | Volume: 8 | Journal Article |

Cited by: Papers (35)

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This article presents a fully integrated ultrasound system based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The PMUT consists of an aluminum nitride, AlN, squared device with 80 μm side that resonates at 2.4 MHz in liquid environment. The monolithic ...Show More

Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications

Iván Zamora;Eyglis Ledesma;Arantxa Uranga;Núria Barniol

Year: 2020 | Volume: 8 | Journal Article |

Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

IEEE Sensors Journal

Year: 2020 | Volume: 20, Issue: 19 | Journal Article |

Cited by: Papers (29)

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In this work, a waterproof tent-plate piezoelectric micromachined ultrasonic transducer (PMUT) with enhanced performance as actuator and sensor in comparison with standard clamped PMUT is presented. The squared AlN PMUT has four linear holes that are sealed by the passive layer allowing to increase the movement and giving the capability to work in liquid environment. The dimension of the holes was...Show More

Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation

Eyglis Ledesma;Iván Zamora;Arantxa Uranga;Núria Barniol

IEEE Sensors Journal

Year: 2020 | Volume: 20, Issue: 19 | Journal Article |

Liquid operable AlN PMUT with high output pressure capabilities

E. Ledesma;I. Zamora;V. Tzanov;F. Torres;A. Uranga;N. Barniol;E. Marigó;Mohan Soundara-Pandian

2019 IEEE International Ultrasonics Symposium (IUS)

Year: 2019 | Conference Paper |

Cited by: Papers (2)

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Two piezoelectric micromachined ultrasonic transducers (PMUTs) with a mode shape like a free membrane and a resonance frequency around 7 MHz in liquid environment are proposed in this paper. Here we evaluate the influence of linear holes (two or four holes) in the movement and consequently in the output pressure. FEM simulations show how the linear holes increase the membrane velocity at least 1.4...Show More

Liquid operable AlN PMUT with high output pressure capabilities

E. Ledesma;I. Zamora;V. Tzanov;F. Torres;A. Uranga;N. Barniol;E. Marigó;Mohan Soundara-Pandian

2019 IEEE International Ultrasonics Symposium (IUS)

Year: 2019 | Conference Paper |

AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates

Eyglis Ledesma;Ivan Zamora;Francesc Torres;Arantxa Uranga;Vassil Tzanov;Nuria Barniol;Eloi Marigo;Mohan Soundara-Pandian

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

Cited by: Papers (13)

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This paper presents a 6×6 AlN piezoelectric micromachined ultrasonic transducers (PMUT) array with competitive performance as an actuator and as sensor compared with other devices using the AlN as piezoelectric material. The novelty is that the AlN-PMUT is fabricated over pre-processed CMOS wafers allowing compactness, better signal processing and higher fill factor (not limited by wafer bonding) ...Show More

AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates

Eyglis Ledesma;Ivan Zamora;Francesc Torres;Arantxa Uranga;Vassil Tzanov;Nuria Barniol;Eloi Marigo;Mohan Soundara-Pandian

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

ALN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency

Eyglis Ledesma;Vassil Tzanov;Iván Zamora;Francesc Torres;Arantxa Uranga;Núria Barniol;Eloi Marigó;Mohan Soundara-Pandian

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

Cited by: Papers (5) | Patents (1)

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A novel AlN PMUT compatible with CMOS-MEMS process is presented. The design is a squared membrane with 4 different sections. The operational frequency of the device in liquid is in the 10 MHz range. Our FEM model shows that the cross-slit increases the displacement as well as the acoustic pressure outputs by a factor of 10. The resulted 4 PMUT sections are sealed by a passive Si3N4 layer allowing ...Show More

ALN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency

Eyglis Ledesma;Vassil Tzanov;Iván Zamora;Francesc Torres;Arantxa Uranga;Núria Barniol;Eloi Marigó;Mohan Soundara-Pandian

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Year: 2019 | Conference Paper |

A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

Jesus Yanez;Francesc Torres;Arantxa Uranga;Nuria Barniol

2019 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)

Year: 2019 | Conference Paper |

Cited by: Papers (3)

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In this study, the feasibility of a piezoelectrical micromachined ultrasonic fingerprint sensor working at GHz range at CMOS-compatible voltage using the PiezoMUMPs process capabilities is explored analytically and through Finite Element Analysis. In addition to the advantages offered by ultrasonic fingerprint sensors based on MEMS technology, the all solid approach used here requires much lower d...Show More

A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

Jesus Yanez;Francesc Torres;Arantxa Uranga;Nuria Barniol

2019 15th Conference on Ph.D Research in Microelectronics and Electronics (PRIME)

Year: 2019 | Conference Paper |

DESIGN OF A FULLY INTEGRATED CMOS-PMUT SYSTEM

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

2018 Conference on Design of Circuits and Integrated Systems (DCIS)

Year: 2018 | Conference Paper |

In this paper we present a full-system (transmitter and receiver) intended to excite and amplify the signal coming from an ultrasonic transducer. The transducer is basically a piezoelectric micromachined ultrasound transducer (PMUT) which will be integrated monolithically over a 0.13 μm high voltage CMOS process. The CMOS circuitry consists of two stages: a high voltage Transmitter, able to actuat...Show More

DESIGN OF A FULLY INTEGRATED CMOS-PMUT SYSTEM

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

2018 Conference on Design of Circuits and Integrated Systems (DCIS)

Year: 2018 | Conference Paper |

Fully Integrated CMOS-PMUT Transceiver

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS)

Year: 2018 | Conference Paper |

Cited by: Papers (2)

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In this paper we present a full-transceiver (transmitter and receiver) intended to excite and amplify the signal coming from an ultrasonic transducer. The transducer is basically a piezoelectric micromachined ultrasound transducer (PMUT) which will be integrated monolithically over a 0.13 μ m high voltage CMOS process. The CMOS circuitry consists of two stages: a high voltage Transmitter, able to ...Show More

Fully Integrated CMOS-PMUT Transceiver

I. Zamora;E. Ledesma;A. Uranga;N. Barniol

2018 25th IEEE International Conference on Electronics, Circuits and Systems (ICECS)

Year: 2018 | Conference Paper |

Monolithical AlN PMUT on Pre-Processed CMOS Substrate

J. Mufioz;F. Torres;A. Uranga;V. Tsanov;N. Bamiol;E. Marigó;M. Soundara-Pandian

2018 IEEE International Frequency Control Symposium (IFCS)

Year: 2018 | Conference Paper |

Cited by: Papers (8)

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In this paper, an AlN piezoelectric micromachined ultrasonic transducer (PMUT) compatible with pre-processed CMOS substrate is presented. Compared to traditional PMUTs, given that this one is on top of a CMOS pre-processed wafer, it will provide benefits in terms of fabrication without the complexity to use wafer bonding. These benefits will be clearly reflected i.e. in arrays, since the smaller p...Show More

Monolithical AlN PMUT on Pre-Processed CMOS Substrate

J. Mufioz;F. Torres;A. Uranga;V. Tsanov;N. Bamiol;E. Marigó;M. Soundara-Pandian

2018 IEEE International Frequency Control Symposium (IFCS)

Year: 2018 | Conference Paper |

Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging

Eloi Marigó Ferrer;Mohanraj Soundara Pandian;Arantxa Uranga;Núria Barniol;Wee Song Tay;Chan Buan Fei

2018 IEEE Micro Electro Mechanical Systems (MEMS)

Year: 2018 | Conference Paper |

Cited by: Papers (2)

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A detailed reliability study on monolithic CMOS-MEMS resonator devices with zero level packaging (ZLP) is reported in this paper. Whilst many methods have been reported to co-integrate MEMS with CMOS circuits in the same die, very few have addressed the challenge to bring the device to the next packaging level and no research shows the impact of critical reliability tests into the MEMS resonator p...Show More

Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging

Eloi Marigó Ferrer;Mohanraj Soundara Pandian;Arantxa Uranga;Núria Barniol;Wee Song Tay;Chan Buan Fei

2018 IEEE Micro Electro Mechanical Systems (MEMS)

Year: 2018 | Conference Paper |

A reliable fast miniaturized RF MEMS-on-CMOS switched capacitor with zero-level vacuum package

M. Riverola;A. Uranga;F. Torres;N. Barniol;E. Marigó;M. Soundara-Pandian

2017 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)

Year: 2017 | Conference Paper |

Cited by: Papers (5)

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This paper reports on the fabrication and characterization of a reliable fast miniaturized RF MEMS-on-CMOS switched capacitor monolithically integrated in a low cost, standard 0.18 pm CMOS technology with zero-level vacuum package. Measured results demonstrate a tuning range of 1:1.9 with a quality factor of 239 at 1 GHz. The mechanical resonance is 6.28 MHz and results in a switching time of only...Show More

A reliable fast miniaturized RF MEMS-on-CMOS switched capacitor with zero-level vacuum package

M. Riverola;A. Uranga;F. Torres;N. Barniol;E. Marigó;M. Soundara-Pandian

2017 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)

Year: 2017 | Conference Paper |

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Arantxa Uranga;Guillermo Sobreviela;Martín Riverola;Francesc Torres;Núria Barniol

IEEE Transactions on Circuits and Systems I: Regular Papers

Year: 2017 | Volume: 64, Issue: 12 | Journal Article |

Cited by: Papers (8)

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In this paper, we will present an all-CMOS oscillator based on monolithically integrated MEMS resonators fabricated from the VIA layer (tungsten) of a 0.35 μm CMOS technology process. With this CMOS MEMS closed-loop system, the nonlinear MEMS frequency response due to the electrostatic actuation has been reconstructed. Using a phase-controlled closed-loop the frequency stability of the self-sustai...Show More

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Arantxa Uranga;Guillermo Sobreviela;Martín Riverola;Francesc Torres;Núria Barniol

IEEE Transactions on Circuits and Systems I: Regular Papers

Year: 2017 | Volume: 64, Issue: 12 | Journal Article |

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