Single-image super-resolution (SISR) techniques have found wide applications in semiconductor defect inspection. Enhancing image resolution to improve inspection sensitivity and accuracy holds great significance. A novel SISR algorithm, called cross-convolutional residual network (CCRN), is proposed in this study. CCRN comprises a cross-convolutional module (CCM), which incorporates a cross-sharin...Show More
Wafer inspection is a crucial step in the semiconductor manufacturing process. Accurate inspection of wafer defects is of great significance in ensuring chip quality, improving production efficiency, and reducing cost losses. However, most wafer defects are irregular and tiny which brings great challenges to defect inspection. At present, most wafer defect inspection is also inefficient and has lo...Show More
Wafer inspection is a crucial step in the semiconductor manufacturing process. Accurate inspection of wafer defects is of great significance in ensuring chip quality, improving production efficiency, and reducing cost losses. Surface defects, such as pits and scratches, have a significant impact on chip yield during the intricate wafer manufacturing process. For further higher inspection capabilit...Show More
In the multi-turn dialogue system, response generation is not only related to the sentences in context but also relies on the words in each utterance. Although there are lots of methods that pay attention to model words and utterances, there still exist problems such as tending to generate common responses. In this paper, we propose a hierarchical self-attention network, named HSAN, which attends ...Show More
