High fluence K-shell and L-shell x-ray sources are desired for various high energy density physics experiments. One efficient method for creating such a source is the laser heating of materials that are underdense to laser light. Nano-wire foams are an ideal choice for an underdense material and have average densities of 6-15 mg/cm 3 . The manufacture of robust Cu, Ag and Au nano-wire foams into m...Show More
Summary form only given, as follows. We have constructed a 30 diameter plasma source chamber to explore the problems associated with large-area inductively coupled plasma (ICP) sources with a view towards sources useful for 400 mm semiconductor wafer processing. Our initial source design experiments use a 25 diameter planar inductive coil driven at 13.56 MHz. Plasma data is taken in Ar and N/sub 2...
