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Design and Implementation of a Guided Surface Acoustic Wave Directional Coupler for Phononic Integrated Circuits
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2025 | Conference Paper |
This work presents the first implementation of a surface acoustic wave (SAW)-based directional coupler for phononic integrated circuits (PnICs). Utilizing a slow-on-fast piezoelectric platform composed of 30% scandium aluminum nitride (ScAlN) alloy thin films on silicon carbide, the design supports both Rayleigh and Sezawa modes. The coupler employs focusing interdigitated transducers (FIDTs) to i...Show More
Design and Analysis of Guided Surface Acoustic Waves in ScAlN on Sapphire for Phononic Integrated Circuits
This study presents a comprehensive dispersion analysis and characterization of guided surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films on sapphire. The solidly mounted platform, which supports the fundamental Rayleigh and Sezawa SAW modes, offers mechanical robustness and high electromechanical coupling ( k_{t}^{2} ), while maintaining high confinement of ...Show More
8-25 GHz Broadband Experimental Quality Factor Extraction of 30% ScAlN with Acoustic Delay Lines
Gabriel Giribaldi;Luca Colombo;Jack Guida;Kapil Saha;Siddhartha Ghosh;Matteo Rinaldi
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
Year: 2024 | Conference Paper |
This work reports on the first experimental characterization of the Quality Factor (Q) of the Cross-sectional Lamé Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X-band. By utilizing three high-crystallinity ScAlN films with thicknesses of 100, 150, and 280 nm, as well as more than 300 Acoustic Delay Lines (ADL), the intrinsic material-based limitation of the Q of ScAlN in the 8-25 ...Show More
Focused Guided Surface Acoustic Waves in 30% Scandium Aluminum Nitride on Silicon Carbide
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
Year: 2024 | Conference Paper |
Slow-on-fast piezoelectric platforms, which describe the relationship between the phase velocity of a piezoelectric material to its substrate, have facilitated the development of guided surface acoustic wave (SAW) devices. Scandium aluminum nitride (ScAlN) alloy thin films, having a lower phase velocity and higher electromechanical coupling $\left( {k_t^2} \right)$ compared to aluminum nitride (Al...Show More
Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators
Luca Colombo;Gabriel Giribaldi;Ryan Tetro;Jack Guida;Walter Gubinelli;Luca Spagnuolo;Nicol Maietta;Siddhartha Ghosh;Matteo Rinaldi
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
Year: 2024 | Conference Paper |
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated piezoelectric micro- and nano-electromechanical (M/NEMS) resonators. The proposed approach models the mechanical quality factor (Qm) and its dependency on piezoelectric (Qp...Show More
Compact Bends and Low-Loss Junctions for S0 Lamb Modes in Fully Etched Scandium Aluminum Nitride Acoustic Waveguides
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2024 | Conference Paper |
Cited by: Papers (4)
This work demonstrates the use of focusing interdigitated transducers (FIDTs) to generate confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides. The waveguides demonstrate acoustic delay lines (ADLs) with 90-degree bends in suspended 30% scandium aluminum nitride (ScAlN) and allow for the characterization of bending losses across various waveguide widths. This work d...Show More
Solidly Mounted Two-Dimensional Guided Modes in 30% Scandium Aluminum Nitride on Sapphire
Jack Guida;Gabriel Giribaldi;Luca Colombo;Matteo Rinaldi;Siddhartha Ghosh
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Year: 2023 | Conference Paper |
Cited by: Papers (3)
This work reports the first demonstration and dispersion analysis of guided S0 Lamb modes in 30% scandium aluminum nitride (ScAlN) on sapphire (SoS). The fundamental Rayleigh and solidly mounted S0 Lamb mode are evaluated and compared in terms of electromechanical coupling as a function of film thickness with respect to wavelength. The propagation loss of each mode is also experimentally character...Show More
Monolithic Integration of X-cut Leaky SAWs and Electrically Small Antennas for RF Passive Wireless Sensors
Luca Colombo;Jack Guida;Nicolas Casilli;Ryan Tetro;Onurcan Kaya;Mary E. Galanko-Klemash;Sarah S. Bedair;Siddhartha Ghosh;Cristian Cassella;Matteo Rinaldi
2023 IEEE International Ultrasonics Symposium (IUS)
Year: 2023 | Conference Paper |
Cited by: Papers (6)
In this work, an on-chip, bulk X-cut Lithium Niobate (LN) platform for the fabrication of monolithical integrated radio frequency (RF) front-ends passives and sensors is presented. Lithographically defined shear horizontal (SH0) Leaky Surface Acoustic Wave (LSAW) resonators and Electrically Small Antennas (ESA) are co-designed and manufactured on the same substrate with a single-step fabrication p...Show More
Focused S0 Lamb Modes for Gigahertz Delay Lines in 30% Scandium Aluminum Nitride
2023 IEEE International Ultrasonics Symposium (IUS)
Year: 2023 | Conference Paper |
Cited by: Papers (5)
Scandium-doped aluminum nitride (ScAlN) is an emergent piezoelectric material for acoustic wave devices, exhibiting higher electromechanical coupling $\left( {k_t^2} \right)$ compared to undoped AlN. The S0 Lamb mode in suspended ScAlN films theoretically supports $k_t^2$ up to ~40%, demonstrating comparable performance to thin film lithium niobate. The high phase velocity of the S0 mode enables g...Show More
Low Propagation Loss X-Band Impedance Matched Lamb Mode Delay Lines in 30% Scandium Aluminum Nitride
Gabriel Giribaldi;Jack Guida;Siddhartha Ghosh;Matteo Rinaldi
2023 IEEE International Ultrasonics Symposium (IUS)
Year: 2023 | Conference Paper |
Cited by: Papers (4)
This work presents the first X-band operating Acoustic Delay Lines (ADL) in 30% Sc-doped Aluminum Nitride (ScAIN) employing a Cross-sectional Lamé Mode of vibration. Devices operating at 8.3, 9.4, and 10.15 GHz, impedance matched to 50, 200, and 500 Ω, and relying on a single top electrode excitation were designed and fabricated on a high-crystallinity piezoelectric thin film. The delay lines exhi...Show More
Analysis of 5−10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride
Sinwoo Cho;Jack Guida;Jack Kramer;Omar A. Barrera;Vakhtang Chulukhadze;Can Cui;Siddhartha Ghosh;Ruochen Lu
2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
Year: 2023 | Conference Paper |
Cited by: Papers (11)
SummaryIn this work, we report a systematic analysis of acoustic waves in thin-film 30% scandium-doped aluminum nitride (ScAlN) between 5 and 10 GHz. Higher-order Lamb mode acoustic delay line (ADL) testbeds are implemented in ScAlN, surpassing the operation frequency of prior reported works. Transducers with different lateral wavelengths (λ) between 0.8 µm and 1.4 µm are fabricated in 500 nm thic...Show More
Shear Horizontal Surface Acoustic Wave FIR Filters in Lithium Niobate on Insulator
Jack Guida;Siva Yegnanarayanan;Matthew Ricci;Siddhartha Ghosh
2022 IEEE International Ultrasonics Symposium (IUS)
Year: 2022 | Conference Paper |
Cited by: Papers (4)
This work demonstrates a digitally weighted FIR filter based on guided SH0 acoustic waves in thin film lithium niobate (TFLN) on insulator. An input interdigitated transducer (IDT) is used to launch the acoustic wave. Output IDTs, or taps, are spaced corresponding to a unit delay of 100 ns with the output taps demonstrating the ability to implement a FIR filter. In contrast with previous work, thi...Show More
Experimental Observation of Electron-Phonon Interaction in Semiconductor on Solidly Mounted Thin-Film Lithium Niobate
2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM)
Year: 2022 | Conference Paper |
Cited by: Papers (2)
We report the experimental demonstration of electron-phonon interaction in a semiconductor on solidly mounted thin-film lithium niobate (LiNbO3). The prototype is based on a shear horizontal surface acoustic wave (SH-SAW) acoustic delay line platform in thin-film LiNbO3-on-sapphire, featuring simultaneously low-loss and high electromechanical coupling (K2). A thin film silicon (Si) layer is transf...Show More
Coupling analysis of a tunable microwave and laterally vibrating MEMS resonator
Siddhartha Ghosh;Danna Rosenberg;Dave Kharas;Cyrus F. Hirjibehedin
2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM)
Year: 2022 | Conference Paper |
Mechanical resonators can be used to mediate an effective interaction between microwave and optical photons [1], [2]. To create this interaction, the mechanical resonator must be simultaneously coupled to both an optical mode and an electrical microwave mode. One way of achieving sufficiently strong coupling between the mechanical and electrical microwave modes is to use the piezoelectric effect. ...Show More
This work demonstrates the first acousto-optic modulators in heterogeneous waveguides of thin film LiNbO3 on Si3N4. Optical modes confined in LiNbO3, SiO2 and Si3N4 are modulated by acoustic waves launched on the surface of LiNbO3 and electrically detected by cavity detuning from an optical resonance.Show More
Reflective Grating Array Based Delay Lines in Thin Film Lithium Niobate on Insulator
2021 IEEE International Ultrasonics Symposium (IUS)
Year: 2021 | Conference Paper |
This work demonstrates delay lines using reflective grating arrays formed through etched grooves in thin film lithium niobate on insulator. SH0 modes are launched and received through a reflector array in this material stack for the first time. The reflection coefficient for etched grooves is determined through simulation and grating arrays are demonstrated experimentally for h/λ ratios of 5×10−3a...Show More
Integrated Microwave Photonic Subsystems
Siva Yegnanarayanan;Dave Kharas;Jason J. Plant;Matt Ricci;Siddhartha Ghosh;Cheryl Sorace-Agaskar;Paul W. Juodawlkis
2021 IEEE Research and Applications of Photonics in Defense Conference (RAPID)
Year: 2021 | Conference Paper |
Cited by: Papers (2)
We review the latest advances in on-chip microwave photonics and describe recent demonstrations using Lincoln Laboratory’s photonic multi-chip module (P-MCM) hybrid integration platform including high-power lasers, wideband modulators, reconfigurable optical filters and wideband high-saturation photodiodes, suitable for the realization of high-performance microwave photonic subsystems-on-a-chip.Show More
A 3-Port Circulator Based on Non-Reciprocal Acoustoelectric Delay Lines
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
Year: 2020 | Conference Paper |
Cited by: Papers (15)
This work describes an approach to utilize acoustoelectric delay lines in an integrated non-magnetic RF circulator. Three adjacent delay lines are defined in X-cut lithium niobate, with a bonded thin film silicon layer in the path of the forward and reverse propagating surface acoustic waves. By applying uniform dc bias (30V) to the Si semiconductor, the delay lines each produce a non-reciprocal r...Show More
FDSOI on Lithium Niobate Using Al2O3 Wafer-Bonding for Acoustoelectric RF Microdevices
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Year: 2019 | Conference Paper |
Cited by: Papers (11)
Acoustoelectric (AE) effects have long been a subject of investigation for applications in acoustic wave amplifiers and signal processors. Recent developments in wafer-bonding techniques are leveraged to demonstrate heterogeneous integration of semiconductor and piezoelectric materials required in these devices. This work demonstrates amplification of surface acoustic waves in 128° Y-cut lithium n...Show More
SAW Correlators in LiNbO3 and GaN on Sapphire
2018 IEEE International Frequency Control Symposium (IFCS)
Year: 2018 | Conference Paper |
Cited by: Papers (18)
This paper describes the use of Lithium Niobate and GaN on sapphire substrates to define SAW correlators for direct sequence spread spectrum modulation. Passive correlators with maximal length sequence periods of 7 and 15 are fabricated and tested on 128° Y-cut bulk Lithium Niobate. The input transducer is modulated at carrier frequencies of 470-930 MHz with a chip duration of 100 n s. At the outp...Show More
RF Oscillators Based on Piezoelectrically Driven Optical Modulation
This paper investigates the use of piezoelectrically actuated acousto-optic modulators as a building block for generating electronic frequency references at radio frequencies (RFs). Similar to the concept of an optoelectronic oscillator, this approach leverages the strengths of multiple domains such as strong photonic confinement with optical resonances and the inherent compact RF filtering capabi...Show More
Acoustic wave transduction in gallium nitride heterostructures
2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS)
Year: 2017 | Conference Paper |
This paper highlights development efforts in the use of AlGaN/GaN heterostructures for launching, receiving and amplifying surface acoustic waves. High-electron mobility transistors (HEMTs) are demonstrated in acoustic wave delay lines with conventional interdigital transducers (IDTs). The amplitude for the transmitted Rayleigh mode is modulated through appropriate HEMT biasing conditions for a co...Show More
Nonreciprocal acoustoelectric interaction of surface waves and fluorine plasma-treated AlGan/GaN 2DEG
Siddhartha Ghosh;Timothy Hancock;Matthew Storey;Lalitha Parameswaran;Michael Geis;Richard Ralston;Dana Weinstein
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
Year: 2017 | Conference Paper |
Cited by: Papers (11)
This paper demonstrates acoustoelectric (AE) effects for surface acoustic waves (SAWs) propagating in an AlGaN/GaN 2DEG, where a fluorine based plasma has been used to tune the carrier concentration. Incorporation of fluorine ions in the AlGaN barrier is shown to reduce sheet carrier density in the 2D layer, which is required to prevent screening of piezoelectric fields. Tuning of the 2DEG channel...Show More
Elasto-optic modulator integrated in high frequency piezoelectric MEMS resonator
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2016 | Conference Paper |
Cited by: Papers (3)
This paper presents a new type of MEMS-based optical modulator, which operates on the elasto-optic effect. The device consists of a photonic racetrack resonator embedded into a laterally-vibrating piezoelectric resonator for strain to be transferred. This constitutes the first demonstration of a MEMS strain-based optomechanical device in which the operation is based on refractive index changes due...Show More
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