The influence of substrate miscut on the surface morphology and Hall mobility at optimized growth conditions of $\beta$-Ga2O3 layers was investigated. The results demonstrate that the surface morphology and the Hall mobility are impacted by the miscut angle of $\beta$-Ga2O3 substrates. For substrates with miscut angle of 6° and a growth rate of about 4 nm/min, a morphology with step bunches was ob...Show More