Andreas Fiedler - IEEE Xplore Author Profile

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Results

The influence of substrate miscut on the surface morphology and Hall mobility at optimized growth conditions of $\beta$-Ga2O3 layers was investigated. The results demonstrate that the surface morphology and the Hall mobility are impacted by the miscut angle of $\beta$-Ga2O3 substrates. For substrates with miscut angle of 6° and a growth rate of about 4 nm/min, a morphology with step bunches was ob...Show More
A Sn-doped (100) $\beta $ -Ga2O3 epitaxial layer was grown via metal–organic vapor phase epitaxy onto a single-crystal, Mg-doped semi-insulating (100) $\beta $ -Ga2O3 substrate. Ga2O3-based metal–oxide–semiconductor field-effect transistors with a 2- $\mu \text{m}$ gate length ( $L_{G})$ , 3.4- $\mu \text{m}$ source–drain spacing ( $L_{\textrm {SD}})$ , and 0.6- $\mu \text{m}$ gate–drain spac...Show More