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Systematic Nonuniformity Analysis of Amorphous Silicon-on-Insulator Photonic Microring Resonators
Journal of Lightwave Technology
Cited by: Papers (10)
Low temperature deposited hydrogenated amorphous silicon (a-Si:H) is a promising material to fabricate compact photonic-electronic integrated circuits (PICs) in multiple layers. However, high refractive index contrast (HIC) photonic circuits are challenging in fabrication and even smallest deviations of the material quality or manufacturing have huge impact on the system performance. We present a ...Show More
Optical multiplexers are key components of modern data transmission systems that have evolved from long-haul fiber communication applications down to the photonic interconnect level on-chip, which demand high bandwidths and low-power photonic links with small footprint. We present compact, energy-efficient, and high-bandwidth optical add/drop multiplexers that are based on complementary metal–oxid...Show More
WDM-filters fabricated with hydrogenated amorphous silicon ring and racetrack resonators
2013 Conference on Lasers & Electro-Optics Europe & International Quantum Electronics Conference CLEO EUROPE/IQEC
Year: 2013 | Conference Paper |
Wavelength-division multiplexing filters are photonic key components for the distribution of multiple optical channels. Microring and racetrack resonators in add/drop configuration can be employed to perform the signal routing. In this work, low-loss hydrogenated amorphous silicon (a-Si:H) was employed as waveguide core material as it is transparent in the near infrared and can be fabricated at lo...Show More
Microfluidic device for the continuous preparation of eukaryotic cells for metabolic analysis
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2013 | Conference Paper |
Cited by: Papers (1)
A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection ...Show More
The a-Si:H deposition process is systematically investigated in intrawafer and wafer-to-wafer experiments. Photonic ring resonators were studied within-chip and chip-to-chip, showing ±1.2nm resonance peak variations and deviations of 0.25% (intrachip) and 0.9%(interchip) for group index and FSR.Show More
High Q-factor hydrogenated amorphous silicon microdisk resonators
2012 17th Opto-Electronics and Communications Conference
Year: 2012 | Conference Paper |
Structured and vertically aligned carbon nanotubes (CNTs) are investigated for their applicability as strain gauges. The CNTs are grown onto an oxidized Si substrate, passivated by a polymer and transferred to a flexible film. This sensor material has a high gauge factor up to 11.5 but also a negative temperature dependence of resistance (TCR with αCNT = -500 ppm/K). For TCR compensation, thin fil...Show More
Positive size-effect on the sensitivity of a planar counter-current micro flame ionization detector
SENSORS, 2010 IEEE
Year: 2010 | Conference Paper |
To reduce fuel gas consumption, a planar counter-current micro flame ionization detector (μFID) has been developed for mobile applications. In this work, the effect of flame chamber size on the μFID sensitivity is investigated. An FEM model is presented, which predicts sensitivity. The model shows that smaller chambers result in more confined flammable mixtures. Flame observations confirm that sma...Show More
A novel gas sensor has been developed which makes use of the paramagnetic characteristics of oxygen in order to determine its concentration in a sample gas. The aim of this micro paramagnetic oxygen sensor, based on an anisotropic magneto resistance (AMR)-device, is to provide an accurate, reasonably priced and long-term stable solution for stationary and mobile oxygen measurement. The functional ...Show More
A novel micro paramagnetic oxygen sensor
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)
Year: 2010 | Conference Paper |
This paper describes a novel paramagnetic sensor for oxygen measurement fabricated in MEMS technology. The sensor is based on the paramagnetic characteristics of oxygen using a permanent magnet for switching the gas flow of the sample gas in a measuring channel and gauging the flow velocity, which depends on the oxygen concentration in the sample gas. Since the sensor measures the velocity using t...Show More
This paper discusses the possibility of total hydrocarbon analysis (THA) with a planar micro flame ionization detector (¿FID). Because of reduced fuel gas consumption, the ¿FID allows for portable applications, which are numerous in the case of THA. Although, the minimum detectable limit (MDL) and fuel gas consumption are still relatively high compared to commercially available portable devices, t...Show More
Total hydrocarbon analysis with a planar micro flame ionization detector
Year: 2009 | Conference Paper |
Amorphous silicon spot-size converters fabricated with a shadow mask
2008 5th IEEE International Conference on Group IV Photonics
Year: 2008 | Conference Paper |
Cited by: Papers (4)
Amorphous Silicon 3-D Tapers for Si Photonic Wires Fabricated With Shadow Masks
Alexander Harke;Timo Lipka;Julia Amthor;Oliver Horn;Michael Krause;JÖrg Muller
Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si wafers, and with the tapers light was coupled into 500-nm-wide...Show More
Development of an Active Intravascular MR Device With an Optical Transmission System
Magnetic resonance imaging (MRI) is a safe and reliable medical imaging method providing good soft tissue contrast while avoiding harmful ionizing radiation. It is highly desirable to use the MRI technology for interventional procedures. However, due to resonance effects that can result in tissue heating, long conducting cables must be avoided. Motivated by the need for more radio-frequency (RF) s...Show More
A One - Chip Solution of a Mass Spectrometer
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Year: 2007 | Conference Paper |
Cited by: Patents (3)
A fully integrated mass spectrometer on one chip with a time of flight (TOF) mass filter is presented. This miniaturized mass spectrometer (MMS) is predestinated for mobile measurements, portable applications as well as continuous process monitoring. The MMS uses a microwave plasma electron source providing a high density electron beam for electron impact ionization. The integrated ion optics extr...Show More
A Micromachined Vapor-Jet Vacuum Pump
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Year: 2007 | Conference Paper |
Cited by: Papers (5)
A MEMS vapor-jet pump for vacuum generation in miniaturized analytical systems, e.g. micro mass-spectrometers, is presented. A high velocity nitrogen- or water-vapor-jet is used for vacuum generation. Starting from atmospheric pressure, a high throughput of more than 50 ml/min and an ultimate pressure of 495 mbar were obtained with this new type of micropump. An approach for the full integration o...Show More
Investigation of the high temperature stability of TiN-Al2O3-TiN capacitors for sub 50nm deep trench DRAM
2006 European Solid-State Device Research Conference
Year: 2006 | Conference Paper |
Cited by: Papers (1)
This paper deals with the investigation of mechanisms leading to a degradation of the electrical properties of titanium nitride - aluminum oxide - titanium nitride capacitors at high temperatures. Several degradation mechanisms could be identified by thorough electrical and physical characterization. The findings will serve as a future guide to build thermally stable MIM capacitorsShow More
Mobile patient monitoring based on impedance-loaded SAW-sensors
A remotely requestable, passive, short-range sensor network for measuring small voltages is presented. The sensor system is able to simultaneously monitor six small voltages in millivolt-range, and it can be used for Holter-electrocardiogram (ECG) and other biopotential monitoring, or in industrial applications. The sensors are based on a surface acoustic wave (SAW) delay line with voltage-depende...Show More
Analysis and design of integrated optical mirrors in planar waveguide technology
Journal of Lightwave Technology
Cited by: Papers (11)
We demonstrate integrated optical mirrors in alumina-based waveguides on oxidized silicon substrates. The finite-element method (FEM) is employed for the design of mirrors operating between 1.31 and 1.55 μm at both fundamental polarizations. Excellent agreement between measurement and simulation is achieved for the dispersion behavior of the device. The highly polarization-dependent scattering los...Show More
Realization of a 150 GHz to 450 GHz tripler circuit based on a thin dielectric HMDS-N-membrane
IEEE MTT-S International Microwave Symposium Digest, 2003
Year: 2003 | Conference Paper |
Cited by: Papers (1)
The realization of a 150 GHz to 450 GHz tripler circuit based on a thin dielectric HMDS-N membrane is described. The design requires an integration of a GaAs-based heterostructure barrier varactor on a passive feeding structure based on a thin dielectric membrane, which is realized by thermocompression bonding. First measurements show sufficient output power and efficiencies.Show More
High-performance 450-GHz GaAs-based heterostructure barrier varactor tripler
M. Saglam;B. Schumann;K. Duwe;C. Domoto;A. Megej;M. Rodriguez-Girones;J. Muller;R. Judaschke;H.L. Hartnagel
In this letter, we report on the record performance of GaAs-based heterostructure barrier varactors (HBVs) in tripler circuits. Both fabrication technique of planar Al/sub 0.7/Ga/sub 0.3/As/GaAs heterostructure barrier varactors (HBVs) and measurements of a corresponding tripler circuit are presented. Planar transmission lines on a thin dielectric membrane and flip-chip technique without air bridg...Show More
Thin film technology for electron beam crystallized silicon solar cells on low cost substrates
Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002.
Year: 2002 | Conference Paper |
In the design described a combination of nitride and carbide layers enables the recrystallization of a silicon absorber deposited on graphite or glass substrates. The interface layer siliconcarbide improves the wettability of the silicon film and the substrate during electron beam recrystallization. To prevent entrapment of deep impurities from the glass substrate aluminumnitride is used as a diff...Show More
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