SPMT, MPST RF MEMS switch using multiplexer approach

Development in MEMS switches has enhances the performance of RF system due to their vast advantages over conventional semiconductor counterparts. Multiple throw switches are widely used in RF and microwave circuits for variety of application like signal routing, multiplexing, couplers, etc. The paper demonstrates the multiplexer based approach for the design of Single Pole Multiple Throw (SPMT) and Multiple Pole Single Throw (MPST) RF MEMS switches. One of the successful MEMS switch configurations, the cantilever-type with electro-static actuation is design and simulated on MEMS based software platform, Intellisuite®. The multiplexer based approach helps in providing the easier selection of multiple switches and cascading of the switches makes this approach more efficient. Surface micromachining technology is typically used to develop different types of single pole multi-throw (SPMT) switches like SPST, SPDT and SPMT.

I. Introduction

Micro-electro-mechanical system (MEMS) based switches and phase shifters have been identified as a promising technology with high potential in the existing Radio Frequency (RF) architectures to reduce weight, cost, size and power dissipation [1]. RF system architectures can be significantly enhanced by increasing the performance and functionality of the RF switches they contain. One important application of the switch is signal routing, which can take many forms [2]. Multi-throw switches are widely used in microwave circuits for Signal routing, switch matrices, true-time-delay phase shifting applications.