Abstract:
Triggering systems for vacuum arc plasma sources and ion sources have been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of...Show MoreMetadata
Abstract:
Triggering systems for vacuum arc plasma sources and ion sources have been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of trigger discharge configurations have been explored, a Penning discharge and a magnetron discharge. The approach works reliably for low gas pressure in the vacuum arc environment and for long periods of operation between required maintenance: pressures in the mid 10/sup -6/ Torr range and for /spl sim/10/sup 6/ pulses.
Published in: Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum
Date of Conference: 21-26 July 1996
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-2906-6
