I. Introduction
Displacement measurement plays a crucial role in various fields such as civil engineering [1], aerospace [2], and mechanical engineering [3]. Nevertheless, existing displacement measurement technologies face certain limitations. For example, surface tool displacement sensor technology demands high-precision self-compensation functions, resulting in elevated labor costs [4]. While the linear variable differential transformer (LVDT) has good environmental adaptability, its installation is complex [5], and the measurement accuracy can be reduced if the installation direction is not precisely aligned with the displacement direction. To address these limitations, Gao et al. [6] developed a 2-D displacement measurement system based on grating, which realized multidimensional measurement technology. Additionally, hostile work environments, subpar performance, and exorbitant costs render several current measurement methods impractical. Some researchers have introduced capacitive sensor systems with varying performance indicators that meet the specific requirements of these tasks admirably. Capacitive sensors, being compact, uncomplicated, and possessing high detection capabilities, prove to be well-suited. Nevertheless, this system encounters challenges associated with manufacturing high-precision, large-area gratings and the necessity for miniaturization. As the intelligent high-end manufacturing industry is driven by new materials, measurement methods, and network communication technologies [7], [8], there is a need for research and attention to improve device performance requirements, which helped to overcome the limitations of traditional testing methods and advance the field of displacement measurement.