The Study of Deposition Process of the TiN coating for Atomic Force Microscopy Cantilevers

Currently, atomic force microscopy (AFM) has become widely used for the study of a wide range of samples, including their topography, local magnetic, electrical properties. The sensor element of the AFM is a special probe (cantilever). The use of cantilevers with a conductive functional coating makes it possible to implement electrophysical techniques in AFM, such as electro-force microscopy, Kelvin probe method, magnetic force microscopy, spreading resistance distribution, etc. The quality of the coating (its structure and electromagnetic properties) determines the quality and relevance of studies by electrical modes of atomic force microscopy. The authors investigate the deposition technologies of such coatings, which make it possible to obtain durable cantilevers with a minimum radius of curvature and high functional characteristics.