A feasibility study on relative humidity sensing using Silicon-on-Nothing pMUTs

In this paper, the use of Silicon-on-Nothing (SON) pMUTs for relative humidity sensing is investigated for the first time. The work presented here demonstrates the sensitivity of these pMUTs to relative humidity variations at constant temperature. For this application, a signal processing methodology is proposed for the mapping of pulse-echo measurements to relative humidity indications. The results obtained from the use of this method are promising and could enable wide use of standard pMUTs for environmental relative humidity sensing for different applications.