A piezoelectric gyroscope with tilted c-axis ScAlN thin-films

Transmission and detection type MEMS gyroscope with a combination of two c-axis tilted ScAlN films where in-plane tilt angles are orthogonal to each other are fabricated. Thus, the polarities of shear wave generated at input piezoelectric film and detected at output piezoelectric film are orthogonal. Although we could not fabricate the setup of the Coriolis force detection experiment for the thin film MEMS devices, a large measurement system for large PZT plate device could be prepared. A preliminary experiment to demonstrate the Coriolis force detection by the transmission and detection type gyroscope have been performed by using a combination of the large shear mode PZT plate operating in the MHz range, instead of the c-axis tilted ScAlN film devices operating in the sub GHz range. In addition, we developed the theoretical model of the transmission and detection type gyroscope device using Mason's equivalent circuit model.