Design and Analysis of SAW Delay Lines for Sensors Applications

The purpose of this study is to model the surface acoustic wave (SAW) delay line for enhancing the device performance of sensors applications. We use, the acousto-mechanical properties, obtained based on the density functional theory (DFT) approach, to calculate the insertion loss of two port for the interdigital transducer (IDT)/AlScN/Sapphire SAW delay line. We investigate the parameters, which are obtained by using different types of SAW delay line modeling. We show that the P-matrix model combined with the coupling-of-modes (COM) approach provides an accurate result in comparison to the experimental results. In addition, we exhibit a decrease in the insertion losses value, an increase in the Sc concentration, and a left shift in the resonance frequency. This obtained result is very promising for SAW sensors design. This promising result will contribute significantly to the SAW sensors design.