Direct Modulation of 16-ch Two-Dimensionally Arrayed Membrane Lasers on Si

We fabricated a 16-ch membrane laser array on a Si chip with a small footprint of 1.11
$\times 2.75\text{mm}^{2}$
. Optical output ports are placed on a front facet via SiO
x
waveguides. All lasers exhibit 32-Gbit/s direct modulation with a current of 17 mA.