Design and Control of 2-DOF Ultrasonic Actuator Applied in Piezoelectric Transmission Module

It is required that the driving device for material in MEMS should be smaller, lighter, and with higher precision. In this paper, the 2-DOF linear ultrasonic actuator is designed based on the configuration of the tower linear ultrasonic actuator. The structure optimization of the ultrasonic actuator is carried out based on ANSYS Parametric Design Language (APDL). Modal analysis and sensitivity analysis are performed to determine the structure parameters. The impedance characteristics of the 2-DOF ultrasonic actuator are analyzed. According to the results of the performance test, the transfer function of the ultrasonic actuator could be identified and the fuzzy PID controller based on GSA is used for controlling the 2-DOF ultrasonic actuator and improving the dynamic performance of the system.