Calculation and optical measurement of SAW diffraction pattern of slanted finger SAW filters on YZ LiNbO/sub 3/ and 128YX LiNbO/sub 3/

The main purpose of the present paper is to investigate diffraction effects on SAW filters using slanted finger interdigital transducers (SFITs). Theoretical and experimental results of diffraction patterns of SFIT SAW filters on two different substrates, YZ LiNbO/sub 3/ and 128YX LiNbO/sub 3/ are presented. The calculated diffraction patterns are obtained using the angular spectrum of plane wave theory. The measured diffraction patterns are obtained using a heterodyne interferometer-type laser probe method. Good agreements between theoretical and experimental results are obtained.