Quantitative Gas Spectroscopy in the 220 to 330 GHz Frequency Band Utilizing a Microelectronic Spectrometer

The development of electronic THz wave rotational absorption spectroscopy for quantitative gas sensing and its experimental validation is reported. The implementation of a THz wave spectrometer operating in the 220 to 330 GHz frequency band using state-of-the-art electronic THz wave radiation sources and detectors is described. The novel system technology for THz wave gas phase spectroscopy is validated by the detection of a broad range of relevant volatile organic compounds, nitrogen compounds, halogenated hydrocarbons, and commercial refrigerants. The sensitivity of the spectrometer meets gas species detection limits set by, e.g. occupational health and safety standards. The large bandwidth (220 to 330 GHz), high frequency resolution (0.5 MHz), and rapid frequency scanning (160 GHz/s) of the spectrometer enables the important analysis of gas mixtures.