CMOS SPAD Imager Array for Wide Radiation Temperature Sensing and Thermal Imaging

We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of
$80~\mu \text{m}$
.