Numerical simulation of silicon grating-based plasmonic sensor

This work reports on the application of silicon grating-enabled nanostructure for refractive index sensing application in the near-infrared region. This grating helps in launching the plasmon modes efficiently towards the flat metal film deposited with a thin Al
2
O
3
layer. The normal incidence light is used which can be helpful for its integration with optical fiber. Numerical simulation is performed using the rigorous coupled-wave analysis (RCWA) method. The proposed structure has shown sensitive and precise sensing behavior.