Design of broadband cross-coupled SIW filter based on TSV

This work proposes a broadband substrate-integrated waveguide (SIW) cross-coupling filter that can be applied to fixed and land mobile services in terahertz communications. The filter is designed by a generalized Chebyshev function. The topology of the filter is' J 'topology by combining tandem topology and box topology. Based on this premise, through-silicon via (TSV) technology and SIW structure are used for modeling and simulation through HFSS high frequency simulation software. The filter has a bandwidth of 0.031THz, takes 0.281THz as the central frequency, the insertion loss is 1.5dB, and the reflection coefficient in the passband is higher than 10.8dB.