Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation

In following paper we propose method of energetic description for active microcantilevers. Microelectromechanical devices (MEMS), to which the microcantilevers belong, are becoming part of energy generation and transformation systems. Therefore efficiency of said devices becomes significant parameter. In our approach we described the method to estimate the efficiency based on the measured parameters of a cantilever and it’s effective movement under actuation. We have conducted measurements an calculations for series of cantilevers actuated electrothermally and electromagnetically. Acquired results are in line with predicted properties of examined MEMS’. Method is suited for description of microcantilevers, assessment of utility and comparison in case of common application. [2022-0043]